Electron beam & thermal evaporator
Status: Run by staff at the moment | Standard operating procedures (under development) | Reserve the tool
Training prerequisites: General cleanroom training Training contact: Arman Tuigynbek Technical contact: Arman Tuigynbek, Zhanibek Balgin
Kurt J. Lesker PVD200 Evaporator
- For metals deposition only
- Long throw evaporation chamber, optimized for lift-off process
- 8-pocket 10kV e-beam source
- 2 thermal evaporation sources
- Substrate size: up to 8" wafers
- Available metals: Au, Pd, Pt, Ag, Cu, Ti, Cr, W, Mo, Al
