Plasma cleaner
Status: | Standard operating procedures (under development) | Reservation is not required
Training prerequisites: General cleanroom training Training contact: Arman Tuigynbek Technical contact: Arman Tuigynbek, Zhanibek Balgin
Harrick Plasma Plasma Cleaner
- Available process gasses: Ar, N2, O2
- Pressure range: 0.5 Torr and higher
