SPS Polos Spincoater

Reservation is not required | Standard operating procedures

• From 1 cm2 substrates to 6" (150 cm) wafers
• Transparent lid with syringe holder for manual central dispensing
• Electro-magnetic safety lid lock
• N2 diffuser for N2 purge during process
• Up to 12.000 RPM
• CW and CCW Rotation

SPS Polos Hotplate

Reservation is not required | Standard operating procedures

• Temperature range: 50 - 230°C
• Default temperature setting: 100°C
• Countdown timer (1-999 sec.) with acoustic alarm
• Temperature uniformity: ±0.5°C
• Heater surface area: 230 x 230mm
• Suitable for up to 200 mm wafers
• Hinged lid, proximity pins, automatic lifting pins

Binder Oven

Reservation is not required | Standard operating procedures

• Temperature range: 30 to 220 °C
• Default temperature setting: 180°C
• Controller with digital display of pressure and temperature
• Program-controlled drying monitoring with automatic ventilation at end of process
• Inert gas and vacuum ready