Sentech SENresearch 4.0 Spectroscopic Ellipsometer

• Spectral range from 190 nm to 2500 nm
• Computer controlled pyramid goniometer 20 deg to 100 deg
• Auto collimating telescope and optical microscope for accurate sample alignment
• Auto height and tilt adjustment
• Spot size: diameter 1.5 – 3 mm
• SpectraRay/4 software package
• Computer controlled mapping with 150 mm travel length, minimum step 5 μm